We have characterized highly conductive Si-doped GaN films with a high electron mobility of 112 cm2Vâ1sâ1 at an electron concentration of 2.9âÃâ1020âcmâ3, prepared using pulsed sputtering deposition (PSD). With an increase in the doping concentration, the absorption edge was found to shift toward a higher energy level, owing to the Burstein-Moss effect, thus making this material suitable for the transparent conductive tunne..