Abstract

Welcome to the webpages dedicated to Focused Electron Beam Induced Processes (FEBIP). This website is dedicated to nanopatterning by chemical reactions (deposition and etching) triggered by a focused electron beam. This nanostructuring approach is resistless and maskless has an experimentally proven limit of detection below 1 nm. This website provides you with background information on FEBIP, an extensive database with references to literature for further reading, as well as information about past and future workshops.